Surface Roughness Measurement

Surface Roughness Measurement

Surface roughness, often shortened to roughness, is a measure of the texture of a surface. It is quantified by the vertical deviations of a real surface from its ideal form. If these deviations are large, the surface is rough; if they are small the surface is smooth. Rtec instruments has various options to characterize surface roughness precisely.

White light interferometer
  • Scanning white light mode for roughness more than 150nm
  • Phase shift mode with green, blue or red light for roughness under 150nm
  • Sub nm Z resolution from white light interferometer
  • 100x to 2,5x magnification
  • Scan large or small samples (XY stage 210x200mm)
  • Also creates 3d image

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White light interferometer + AFM combo system
  • For any kind of sample
  • Adds advantages from AFM and white light interferometer on same platform
  • Gets sub nm XYZ resolutions
  • Sample moves automatically between AFM and optical profiler head