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DEFECT, FEATURE AND SURFACE PROFILING

Surface Profiling

Defects , surface profiling is critical to any coating, semiconductor etc. industries. The high number of defects can result in material or device failures. Rtec instruments has various options to characterize defects or do surface profiling precisely.

White light interferometer
  • Scanning white light mode for roughness more than 150nm
  • Phase shift mode with green, blue or red light for roughness under 150nm
  • Sub nm Z resolution from white light interferometer
  • 100x to 2,5x magnification
  • Scan large or small samples (XY stage 210x200mm)
  • Also creates 3d image
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For product information click here

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White light interferometer + AFM combo system
  • For any kind of sample
  • Adds advantages from AFM and white light interferometer on same platform
  • Gets sub nm XYZ resolutions
  • Sample moves automatically between AFM and optical profiler head
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For more info click here